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Ultra-pure diaphragm valve

Even at high temperatures and under compressive stress


Thanks to making consistent improvements to processes and investments in state-of-the-art manufacturing technologies, valve specialist GEMü can offer its customers plastic diaphragm valves with a significantly higher pressure-temperature rating. 

Numerous applications in the semiconductor, foodstuff and pharmaceutical industries benefit from plastic diaphragm valves with a high pressure-temperature rating. They ensure safe operation not only at high temperatures but also under high pressures. The diaphragm valves in the GEMü 677HP PurePlus series exhibit improved properties with regard to the relationship between pressure and temperature. This makes them perfect for treating and distributing high-temperature ultra-pure water (hot deionized water) and means that they play a direct role in ensuring the reliability and efficiency of users' production processes.

Users working in the semiconductor industry need a downstream cleaning process with ultra-pure water in the wet process section in order to remove the caustic agent. To minimize cleaning times, they use high-temperature ultra-pure water (between 60 °C and 90 °C). However, the chemically aggressive properties of high-temperature ultra-pure water pose a challenge for the process valves. All the valves that come into contact with high-temperature ultra-pure water must be able to guarantee resistant and low-maintenance sealing at elevated and varying temperatures. 

This is made possible by the reliable valve seat seal used in the diaphragm valves in the GEMü 677HP PurePlus series, which is capable of withstanding high loads. The integrated sealing contour in the chemically resistant valve bodies made of Solef PVDF, combined with the precision-fit GEMü PTFE diaphragm, makes the diaphragm valve suitable for this demanding application. 

The results of extensive qualification and fields tests – as well as feedback from long-standing customers – have gone into optimizing the valve seat seal. This means that the GEMü 677HP PurePlus valve can be reliably employed in an ultra-pure water treatment system even at media temperatures of between 60 °C and 80 °C, and at an operating pressure of 5.9 to 7.9 bar (depending on the media temperature).

The valve body of the GEMü 677HP PurePlus is available both in a 2/2-way version and in a T-body configuration with a nominal size of DN 15 to DN 100. A lockable, low-maintenance bonnet ensures operational safety, and can be delivered with an integrated electrical position indicator upon request.

Source: GEMü Gebr. Müller Apparatebau GmbH & Co. KG
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